Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2009 Vol. 267; Iss. 12-13
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PDMS patterning by proton beam
S.Z. Szilasi, R. Huszank, A. Csik, C. Cserháti, I. RajtaVolume:
267
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.nimb.2009.03.038
File:
PDF, 464 KB
english, 2009