Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2009 Vol. 267; Iss. 12-13
Aperture edge scattering in focused MeV ion beam lithography and nuclear microscopy: An application for the GEANT4 toolkit
S. Gorelick, Harry J. WhitlowVolume:
267
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2009.03.074
File:
PDF, 444 KB
english, 2009