Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2009 Vol. 267; Iss. 18
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Determination of plasma parameters in rf glow-discharge plasma
P. Altantsog, Sh. Chadraabal, G. BatdemberelVolume:
267
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2009.06.090
File:
PDF, 350 KB
english, 2009