Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2010 Vol. 268; Iss. 10
Etching and structure transformations in uncured epoxy resin under rf-plasma and plasma immersion ion implantation
Alexey Kondyurin, Marcela BilekVolume:
268
Year:
2010
Language:
english
Pages:
13
DOI:
10.1016/j.nimb.2010.03.014
File:
PDF, 1.45 MB
english, 2010