Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2010 Vol. 268; Iss. 16
A Monte Carlo study of surface sputtering by dual and rotated ion beams
Taha Yasseri, Reiner KreeVolume:
268
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.nimb.2010.05.062
File:
PDF, 1.07 MB
english, 2010