A Monte Carlo study of surface sputtering by dual and...

A Monte Carlo study of surface sputtering by dual and rotated ion beams

Taha Yasseri, Reiner Kree
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Volume:
268
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.nimb.2010.05.062
File:
PDF, 1.07 MB
english, 2010
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