Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2011 Vol. 269; Iss. 6
Etch-free formation of porous silicon by high-energy ion irradiation
Alejandro G. Perez-Bergquist, Fabian U. Naab, Yanwen Zhang, Lumin WangVolume:
269
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2011.01.009
File:
PDF, 625 KB
english, 2011