Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm
Liang-Chia Chen, Yao-Ting Huang, Xuan-Loc Nguyen, Jin-Liang Chen, Chung-Chu ChangVolume:
47
Year:
2009
Language:
english
Pages:
15
DOI:
10.1016/j.optlaseng.2008.05.016
File:
PDF, 2.96 MB
english, 2009