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Micro-motion analyzer used for dynamic MEMS characterization
Tong Guo, Hong Chang, Jinping Chen, Xing Fu, Xiaotang HuVolume:
47
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.optlaseng.2008.09.006
File:
PDF, 1.48 MB
english, 2009