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A nanomeasuring machine based white light tilt scanning interferometer for large scale optical array structure measurement
Tong Guo, Long Ma, Jian Zhao, Dante J. Dorantes-Gonzalez, Xing Fu, Xiaotang HuVolume:
49
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.optlaseng.2011.05.011
File:
PDF, 1.43 MB
english, 2011