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Laser machining of silicon nitride based composite cantilever structures
Gurdial Blugan, Thomas Herrmann, Thomas Graule, Jakob KueblerVolume:
49
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.optlaseng.2011.05.017
File:
PDF, 1.26 MB
english, 2011