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Profile measurement system based on linnik-type interferometric microscope for visible-light region and infrared-light region
Hualing Guo, Lishuang Liu, Xiaojian Hao, Kangkang Niu, Xiujian ChouVolume:
43
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.optlastec.2011.03.006
File:
PDF, 715 KB
english, 2011