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Growth and characterization of SiON thin films by using thermal-CVD machine
R.K. Pandey, L.S. Patil, J.P. Bange, D.R. Patil, A.M. Mahajan, D.S. Patil, D.K. GautamVolume:
25
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.optmat.2003.07.003
File:
PDF, 332 KB
english, 2004