Radiation stability of EUV Mo/Si multilayer mirrors

Physica B: Condensed Matter 2005 Vol. 357; Iss. 1-2

Radiation stability of EUV Mo/Si multilayer mirrors

Nicolas Benoit, Sergiy Yulin, Torsten Feigl, Norbert Kaiser
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Volume:
357
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.physb.2004.11.062
File:
PDF, 268 KB
english, 2005
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