Growth of misfit dislocation-free p/p+ thick epitaxial...

Physica B: Condensed Matter 2006 Vol. 376-377; Iss. none

Growth of misfit dislocation-free p/p+ thick epitaxial silicon wafers on Ge–B-codoped substrates

Huihua Jiang, Deren Yang, Xiangyang Ma, Daxi Tian, Liben Li, Duanlin Que
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Volume:
376-377
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.physb.2005.12.209
File:
PDF, 242 KB
english, 2006
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