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Epitaxial growth of ZnO films by helicon-wave-plasma-assisted sputtering
Guangsheng Fu, Heju Xu, Shufang Wang, Wei Yu, Wei Sun, Li HanVolume:
382
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.physb.2006.01.535
File:
PDF, 158 KB
english, 2006