Effect of copolymer composition on acid-catalyzed...

Polymer 2006 Vol. 47; Iss. 18

Effect of copolymer composition on acid-catalyzed deprotection reaction kinetics in model photoresists

Shuhui H. Kang, Vivek M. Prabhu, Bryan D. Vogt, Eric K. Lin, Wen-li Wu, Karen Turnquest
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Volume:
47
Year:
2006
Language:
english
Pages:
10
DOI:
10.1016/j.polymer.2006.07.003
File:
PDF, 508 KB
english, 2006
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