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Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage
Wei Gao, Yoshikazu Arai, Atsushi Shibuya, Satoshi Kiyono, Chun Hong ParkVolume:
30
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.precisioneng.2005.06.003
File:
PDF, 517 KB
english, 2006