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Design and modeling of a six DOFs MEMS-based precision manipulator
D.M. Brouwer, B.R. de Jong, H.M.J.R. SoemersVolume:
34
Year:
2010
Language:
english
Pages:
13
DOI:
10.1016/j.precisioneng.2009.08.001
File:
PDF, 1.73 MB
english, 2010