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Innovative dielectrics for semiconductor technology
R.S. Brusa, C. Macchi, S. Mariazzi, G.P. Karwasz, G. Scarel, M. FanciulliVolume:
76
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.radphyschem.2006.03.033
File:
PDF, 249 KB
english, 2007