Characterization of high-k gate dielectric and metal gate electrode semiconductor samples with a total reflection X-ray fluorescence spectrometer
Chris M. Sparks, Meredith R. Beebe, Joe Bennett, Brendan Foran, Carolyn Gondran, Alex HouVolume:
59
Year:
2004
Language:
english
Pages:
8
DOI:
10.1016/j.sab.2004.04.009
File:
PDF, 443 KB
english, 2004