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Development of hafnium oxynitride dielectrics for radio-frequency-microelectromechanical system capacitive switches
Yi Zhang, Jian Lu, Kazumasa Onodera, Ryutaro MaedaVolume:
139
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2007.02.005
File:
PDF, 423 KB
english, 2007