Performance analysis of microcantilever arrays for optical...

Sensors and Actuators A: Physical 2007 Vol. 137; Iss. 1

Performance analysis of microcantilever arrays for optical readout uncooled infrared imaging

Zheying Guo, Qingchuan Zhang, Fengliang Dong, Dapeng Chen, Zhiming Xiong, Zhengyu Miao, Chaobo Li, Binbin Jiao, Xiaoping Wu
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Volume:
137
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2007.02.006
File:
PDF, 835 KB
english, 2007
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