Surface micromachined accelerometer using ferroelectric substrate
Seiji Aoyagi, Sho Kumagai, Daiichiro Yoshikawa, Yuichi IsonoVolume:
139
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2007.03.021
File:
PDF, 1.28 MB
english, 2007