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Silicon shadow mask fabrication for patterned metal deposition with microscale dimensions using a novel corner compensation scheme
Matt Apanius, Pankaj B. Kaul, Alexis R. AbramsonVolume:
140
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2007.06.028
File:
PDF, 939 KB
english, 2007