Drop ejection utilizing sideways actuation of a MEMS piston

Sensors and Actuators A: Physical 2008 Vol. 141; Iss. 1

Drop ejection utilizing sideways actuation of a MEMS piston

Paul Galambos, Dave Czaplewski, Rick Givler, Kenneth R. Pohl, David L. Luck, Gilbert Benavides, Bernie Jokiel
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Volume:
141
Year:
2008
Language:
english
Pages:
10
DOI:
10.1016/j.sna.2007.07.026
File:
PDF, 1.37 MB
english, 2008
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