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Scanning electron microscopy for vacuum quality factor measurement of small-size MEMS resonators
J.P. Gilles, S. Megherbi, G. Raynaud, F. Parrain, H. Mathias, X. Leroux, A. BosseboeufVolume:
145-146
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2007.11.026
File:
PDF, 1.22 MB
english, 2008