Monolithic fabrication of multilayer P(VDF-TrFE) cantilevers
N. Snis, E. Edqvist, U. Simu, S. JohanssonVolume:
144
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2008.01.004
File:
PDF, 468 KB
english, 2008