Electrostatically actuated nonconductive polymer microresonators in gaseous and aqueous environment
S. Schmid, P. Senn, C. HieroldVolume:
145-146
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2008.01.010
File:
PDF, 635 KB
english, 2008