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Piezoelectric unimorph valve assembled on an LTCC substrate
M. Sobocinski, J. Juuti, H. Jantunen, L. GolonkaVolume:
149
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.sna.2008.11.025
File:
PDF, 428 KB
english, 2009