Application of piezoresistive stress sensors in ultra thin...

Sensors and Actuators A: Physical 2009 Vol. 156; Iss. 1

Application of piezoresistive stress sensors in ultra thin device handling and characterization

Xiaowu Zhang, Aditya Kumar, Q.X. Zhang, Y.Y. Ong, S.W. Ho, C.H. Khong, V. Kripesh, John H. Lau, D.-L. Kwong, V. Sundaram, Rao R. Tummula, Georg Meyer-Berg
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Volume:
156
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2009.01.024
File:
PDF, 1.26 MB
english, 2009
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