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A wafer-scale encapsulated RF MEMS switch with a stress-reduced corrugated diaphragm
Feixiang Ke, Jianmin Miao, Zhihong WangVolume:
151
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2009.02.031
File:
PDF, 1.65 MB
english, 2009