Contactless magnetic temperature sensors for turbo-molecular pumps
O. Bottauscio, M. Chiampi, G. Crotti, F. Fiorillo, S. Giors, G. Pittà, C. QuartaroneVolume:
153
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2009.05.012
File:
PDF, 994 KB
english, 2009