MEMS-based hydraulic displacement amplification mechanism with completely encapsulated liquid
T. Ninomiya, Y. Okayama, Y. Matsumoto, X. Arouette, K. Osawa, N. MikiVolume:
166
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2009.07.002
File:
PDF, 899 KB
english, 2011