A multifunctional integrated silicon tactile imager with arrays of strain and temperature sensors on single crystal silicon diaphragm
Hidekuni Takao, Masaki Yawata, Kazuaki Sawada, Makoto IshidaVolume:
160
Year:
2010
Language:
english
Pages:
9
DOI:
10.1016/j.sna.2010.03.039
File:
PDF, 2.32 MB
english, 2010