A micro-machined Pirani gauge for vacuum measurement of...

Sensors and Actuators A: Physical 2010 Vol. 161; Iss. 1-2

A micro-machined Pirani gauge for vacuum measurement of ultra-small sized vacuum packaging

Xuefang Wang, Chuan Liu, Zhuo Zhang, Sheng Liu, Xiaobing Luo
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
161
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2010.04.034
File:
PDF, 586 KB
english, 2010
Conversion to is in progress
Conversion to is failed