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Design, simulation and testing of electrostatic SOI MUMPs based microgripper integrated with capacitive contact sensor
Shafaat Ahmed Bazaz, Fahimullah Khan, Rana Iqtidar ShakoorVolume:
167
Year:
2011
Language:
english
Pages:
10
DOI:
10.1016/j.sna.2010.12.003
File:
PDF, 2.77 MB
english, 2011