Fabrication of silicon oxycarbide-based microcomponents via...

Sensors and Actuators A: Physical 2011 Vol. 169; Iss. 1

Fabrication of silicon oxycarbide-based microcomponents via photolithographic and soft lithography approaches

S. Martínez-Crespiera, E. Ionescu, M. Schlosser, K. Flittner, G. Mistura, R. Riedel, H.F. Schlaak
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Volume:
169
Year:
2011
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2011.04.041
File:
PDF, 1.81 MB
english, 2011
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