High-temperature low-power performing micromachined...

High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications

J. Cerdà Belmonte, J. Puigcorbé, J. Arbiol, A. Vilà, J.R. Morante, N. Sabaté, I. Gràcia, C. Cané
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Volume:
114
Year:
2006
Language:
english
Pages:
10
DOI:
10.1016/j.snb.2005.07.057
File:
PDF, 683 KB
english, 2006
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