High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications
J. Cerdà Belmonte, J. Puigcorbé, J. Arbiol, A. Vilà, J.R. Morante, N. Sabaté, I. Gràcia, C. CanéVolume:
114
Year:
2006
Language:
english
Pages:
10
DOI:
10.1016/j.snb.2005.07.057
File:
PDF, 683 KB
english, 2006