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Parylene micro membrane capacitive sensor array for chemical and biological sensing
Srinath Satyanarayana, Daniel T. McCormick, Arun MajumdarVolume:
115
Year:
2006
Language:
english
Pages:
9
DOI:
10.1016/j.snb.2005.10.013
File:
PDF, 486 KB
english, 2006