Development of a gas detection micro-device for hydrogen fluoride vapours
Jean-Baptiste Sanchez, Franck Berger, William Daniau, Pascal Blind, Michel Fromm, Marie-Hélène NadalVolume:
113
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.snb.2005.11.025
File:
PDF, 765 KB
english, 2006