![](/img/cover-not-exists.png)
Novel design and characterisation of SOI CMOS micro-hotplates for high temperature gas sensors
P.K. Guha, S.Z. Ali, C.C.C. Lee, F. Udrea, W.I. Milne, T. Iwaki, J.A. Covington, J.W. GardnerVolume:
127
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.snb.2007.07.047
File:
PDF, 1.37 MB
english, 2007