Experiment and theoretical analysis of relative humidity...

Sensors and Actuators B: Chemical 2010 Vol. 147; Iss. 2

Experiment and theoretical analysis of relative humidity sensor based on film bulk acoustic-wave resonator

Xiaotun Qiu, Rui Tang, Jie Zhu, Jonathon Oiler, Cunjiang Yu, Ziyu Wang, Hongyu Yu
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Volume:
147
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.snb.2010.04.012
File:
PDF, 309 KB
english, 2010
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