Scaling properties of a Si surface patterned by selective chemical etching
G. Wisz, T.Ya. Gorbach, P.S. Smertenko, A. Blahut, K. Zembrowska, M. KuzmaVolume:
36
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.spmi.2004.08.020
File:
PDF, 703 KB
english, 2004