Deep SiC etching with RIE
M. Lazar, H. Vang, P. Brosselard, C. Raynaud, P. Cremillieu, J.-L. Leclercq, A. Descamps, S. Scharnholz, D. PlansonVolume:
40
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.spmi.2006.06.015
File:
PDF, 320 KB
english, 2006