Nano-patterning with Block Copolymers

Nano-patterning with Block Copolymers

Pietro La Fata, Rosaria Puglisi, Salvatore Lombardo, Corrado Bongiorno
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Volume:
44
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.spmi.2007.12.017
File:
PDF, 688 KB
english, 2008
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