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Selective Si growth on partially desorbed SiO2/Si(001) surfaces
L.H. Nguyen, C. Renard, V. Yam, F. Fossard, D. Débarre, D. BouchierVolume:
44
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.spmi.2007.12.018
File:
PDF, 676 KB
english, 2008