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SiC polytypes process affected by Ge predeposition on Si(111) substrates
Richard Nader, Elie Moussaed, Michel Kazan, Joerg Pezoldt, Pierre MasriVolume:
44
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.spmi.2008.06.001
File:
PDF, 747 KB
english, 2008