Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma
M. Miyauchi, Y. Miyoshi, Z.Lj. Petrović, T. MakabeVolume:
51
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.sse.2007.08.012
File:
PDF, 1.04 MB
english, 2007