Impact of the gate stack on the electrical performances of...

Solid-State Electronics 2008 Vol. 52; Iss. 9

Impact of the gate stack on the electrical performances of 3D multi-channel MOSFET (MCFET) on SOI

Emilie Bernard, T. Ernst, B. Guillaumot, N. Vulliet, X. Garros, V. Maffini-Alvaro, P. Coronel, T. Skotnicki, S. Deleonibus
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Volume:
52
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.sse.2008.04.014
File:
PDF, 520 KB
english, 2008
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