Anodic Ta2O5 for CMOS compatible low voltage electrowetting-on-dielectric device fabrication
Y. Li, W. Parkes, L.I. Haworth, A.A. Stokes, K.R. Muir, P. Li, A.J. Collin, N.G. Hutcheon, R. Henderson, B. Rae, A.J. WaltonVolume:
52
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.sse.2008.04.030
File:
PDF, 828 KB
english, 2008